However, as a way to approach the crystal is rather State-of-the-art production techniques are expected. Since the dawn of the crystal, engaged on this obstacle, we are now the only real organization in the world which can be processed in this crystal.
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We summarized the current enhancement standing of the significant-electrical power DUV laser both equally with the wavelength of FHG on the 1-μm laser and at 193 nm. The current improvement on the strong-point out/fiber laser, plus the nonlinear optical crystals, prompts not only the common ability but additionally the beam good quality (coherence) of the DUV lasers to an unprecedented degree.
The important thing dilemma of ultraviolet coherent gentle supply generally concentrates on the event of nonlinear optical frequency conversion crystal in ultraviolet band. The nonlinear optical crystal has become the ailments for frequency transformation, so The expansion, size, problems resistance, conversion performance and allowable parameter choice of nonlinear optical crystal are demanded A growing number of.
Then again, the beam high quality of the higher electricity DUV laser would become worse resulting from far more serious thermal and nonlinear results. That's why, the frequency conversion procedures needs to be meticulously meant to mitigate the aforementioned effects. Hence, a significant-power DUV laser on the FHG of 1 μm with a fantastic beam quality could possibly be received and can be beneficial for obtaining the shorter wavelength DUV lasers such as 193 nm by SFG.
Both the 1040 nm and 1078 nm laser originate from just one dual-wavelength Yb-doped fiber laser. Each and every laser is amplified by stages of fiber amplifier and Yb-doped products amplifier, respectively.
On the opposite aspect, the power scaling of your NIR laser is an additional part to improve the regular electricity in the 193-nm DUV laser. A result of the insufficient the high-ability amplification Option in the NIR laser (such as at 1553 nm), nonlinear frequency procedures for instance optical parameter oscillation (OPO) can be applied to make a wavelength converter by shifting the wavelength from one μm to the desired wavelength and also getting relative greater electricity [21]. Recently, a diamond Raman laser showed its means in reaching a substantial ability along with a large conversion effectiveness on the 1st Stokes in the 1-μm laser [22,23], which suggests the likelihood being used during the 193-nm DUV laser technology because of its significant Raman acquire and enormous frequency change.
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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the most effective non-linear crystal which generates ultraviolet harmonics of your Nd:YAG elementary laser wavelength. As a way to enhance the destruction threshold, minimal CLBO surface roughness, by extremely-precision machining, is needed. Since the CLBO crystal has straightforward hydroscopic reaction and micro scratches in machining, extremely-exact machining in the CLBO crystal can be a tricky complex challenge.
The beam profile revealed in Determine 7b demonstrated a superb beam high-quality as among the merits of Raman laser, which would be beneficial to crank out a 193-nm DUV laser with a high quality beam.
The conversion efficiency from elementary NIR to DUV is from five% to 36% based on the described results in Table 1. Rising the conversion performance will reduce the burden on the design and set up of the basic laser amplifier and also the electric electrical power intake. A very good beam top quality of the elemental laser will even lead for the rising with the conversion performance as well as the appropriate energy intensity of the NIR and environmentally friendly laser during the SHG and FHG process, respectively. The highest conversion efficiencies from NIR to environmentally friendly and environmentally friendly to DUV laser by usage click here of CLBO crystal are 70% and around 50%, respectively [twelve], which corresponds to your conversion effectiveness of 35% from fundamental to DUV.
The event of the 193-nm laser was shown by stages of SFG. So as to scale the DUV laser energy proficiently, a brand new strategy in the 193-nm DUV laser era is offered based on the diamond Raman laser.